Professor of Electrical Engineering and Computer Science and Director of Undergraduate Education, College of Engineering
1301 Beal Avenue
Ann Arbor, MI 48109-2122
Applied Physics Program
Ph.D. Massachusetts Institute of Technology, Electrical Engineering and Computer Science, 1985
M.S. and B.S. MIT, Electrical Engineering, 1981.
Techniques (especially nondestructive) for characterization of electronic materials and nanostructures; in situ process monitoring; control of semiconductor processes; physics of solid state devices; insulated gate transistor physics and technology; properties of electronic materials and their effects on devices; reliability of semiconductor devices, particularly in hostile environments.
Current Research Activities
Short and mid-infrared spectroscopy for remote chemical detection and identification. Use of computational scattering theories to model the infrared scattering spectrum of particulate materials and their interactions with substrate materials. Techniques for accurate calibration of infrared remote sensors.